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<p>Difficult-to-machine materials are widely used in high-end manufacturing fields such as aerospace, microelectronics, and national defense because of their excellent physical, chemical, and mechanical properties. The machining quality of these materials directly affects the structural integrity and performance stability of key components during long-term service. With the development of high-end equipment toward high performance, high reliability, and high precision, problems such as high hardness, high brittleness, and high chemical stability become more serious during machining. As a result, traditional machining methods face clear challenges in material removal efficiency, surface integrity control, and subsurface damage reduction. Plasma-assisted machining introduces high-energy ions, radicals, and excited particles into the machining area, which can effectively control the physical state and chemical activity of the material surface. This helps reduce material removal resistance and provides a promising technical approach for high-precision and low-damage machining. Focusing on the demand for high-quality machining of difficult-to-machine materials, this paper systematically reviews the research progress of plasma-assisted machining technologies and summarizes the interaction mechanisms between plasma and material surfaces and their effects on machining performance. First, the basic mechanisms of plasma–material surface interaction are introduced, with emphasis on the roles of physical bombardment, chemical reactions, and their combined effects in material removal and surface modification. Second, the effects of different plasma types and key process parameters on material removal behavior, surface morphology evolution, and subsurface damage suppression are summarized. Research progress on the control of multiple physical properties of material surfaces and near-surface regions under plasma-assisted conditions is also reviewed. Then, the main problems faced by current plasma-assisted machining technologies in mechanism understanding, process stability, and engineering application are analyzed. Finally, future development trends and key challenges of plasma-assisted machining in high-end manufacturing are discussed, aiming to provide useful references for further basic research and engineering applications.</p>

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A review of plasma-assisted machining of difficult-to-machine materials: mechanisms, processes, and surface integrity

  • 期刊论文

  • 发表日期：

    2026年5月18日

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  • Minghao Guo,
  • Gang Jin,
  • Zhanjie Li,
  • Desheng Li,
  • Mengpan Hu,
  • Yonglin Min,
  • Libin Cui,
  • Zhoujing Lai

摘要

Difficult-to-machine materials are widely used in high-end manufacturing fields such as aerospace, microelectronics, and national defense because of their excellent physical, chemical, and mechanical properties. The machining quality of these materials directly affects the structural integrity and performance stability of key components during long-term service. With the development of high-end equipment toward high performance, high reliability, and high precision, problems such as high hardness, high brittleness, and high chemical stability become more serious during machining. As a result, traditional machining methods face clear challenges in material removal efficiency, surface integrity control, and subsurface damage reduction. Plasma-assisted machining introduces high-energy ions, radicals, and excited particles into the machining area, which can effectively control the physical state and chemical activity of the material surface. This helps reduce material removal resistance and provides a promising technical approach for high-precision and low-damage machining. Focusing on the demand for high-quality machining of difficult-to-machine materials, this paper systematically reviews the research progress of plasma-assisted machining technologies and summarizes the interaction mechanisms between plasma and material surfaces and their effects on machining performance. First, the basic mechanisms of plasma–material surface interaction are introduced, with emphasis on the roles of physical bombardment, chemical reactions, and their combined effects in material removal and surface modification. Second, the effects of different plasma types and key process parameters on material removal behavior, surface morphology evolution, and subsurface damage suppression are summarized. Research progress on the control of multiple physical properties of material surfaces and near-surface regions under plasma-assisted conditions is also reviewed. Then, the main problems faced by current plasma-assisted machining technologies in mechanism understanding, process stability, and engineering application are analyzed. Finally, future development trends and key challenges of plasma-assisted machining in high-end manufacturing are discussed, aiming to provide useful references for further basic research and engineering applications.