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<p>This study presents a comprehensive investigation into the laser machining of 0.63&#xa0;mm aluminium nitride (AlN) using high power picosecond pulsed lasers. The effects of key processing parameters, including average power, scan speed, pulse repetition frequency, and number of passes, on machining outcomes such as machining depth and kerf width were systematically evaluated. Statistical analysis identified that all control factors and their interactions, except average power and frequency, influence the machining depth, while average power and frequency were found to predominantly affect kerf width. The material removal mechanism was determined to involve vaporisation and melt formation followed by ejection driven by recoil pressure. Burst mode operation significantly enhanced the depth, particularly at lower frequencies, with high pulse energies of the sub-pulses proving critical for efficient material ejection. Under optimised conditions, a maximum cutting speed of 300&#xa0;mm/min was achieved, corresponding to a cutting efficiency of 1.7&#xa0;mm/min.W. Furthermore, machining strategies such as focal compensation and scribe-and-snap techniques improved the taper angle by a factor of 2.8 and increased productivity by 50% respectively. These findings provide valuable insights into high power picosecond laser material interactions in AlN and offer practical approaches for precision machining of advanced ceramics.</p>

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Picosecond laser machining of aluminium nitride ceramics using a 250 W laser source

  • 期刊论文

  • 发表日期：

    2026年5月2日

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  • Stephen D. Dondieu,
  • Chris Powley,
  • David Milne,
  • Cheng Long Huang,
  • Man-Ning Lu,
  • Sundar Marimuthu

摘要

This study presents a comprehensive investigation into the laser machining of 0.63 mm aluminium nitride (AlN) using high power picosecond pulsed lasers. The effects of key processing parameters, including average power, scan speed, pulse repetition frequency, and number of passes, on machining outcomes such as machining depth and kerf width were systematically evaluated. Statistical analysis identified that all control factors and their interactions, except average power and frequency, influence the machining depth, while average power and frequency were found to predominantly affect kerf width. The material removal mechanism was determined to involve vaporisation and melt formation followed by ejection driven by recoil pressure. Burst mode operation significantly enhanced the depth, particularly at lower frequencies, with high pulse energies of the sub-pulses proving critical for efficient material ejection. Under optimised conditions, a maximum cutting speed of 300 mm/min was achieved, corresponding to a cutting efficiency of 1.7 mm/min.W. Furthermore, machining strategies such as focal compensation and scribe-and-snap techniques improved the taper angle by a factor of 2.8 and increased productivity by 50% respectively. These findings provide valuable insights into high power picosecond laser material interactions in AlN and offer practical approaches for precision machining of advanced ceramics.