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<p>Microchannels (MICHs) play a critical role in microfluidic, thermal management, and MEMS-based applications, where dimensional precision and surface integrity are essential. Although laser micromachining offers a rapid and flexible fabrication approach, systematic multi-parameter optimization for plexiglas-based microchannels remains limited. In this study, a statistically validated optimization framework was developed for CO₂ laser micromachining of plexiglas substrates. Five key process parameters—laser power, traverse velocity, pulse frequency, spot size, and number of passes—were investigated using Response Surface Methodology (RSM) combined with Central Composite Design (CCD). Scanning Electron Microscopy (SEM) was employed to evaluate channel geometry, surface morphology, and heat-affected zone characteristics. The results indicate that increased laser power significantly enhances channel depth, while higher traverse velocity reduces thermal penetration. Interaction analysis revealed dominant influence of power and traversing on both depth and width responses. The developed regression models demonstrated strong statistical adequacy (R² &gt; 0.97) with prediction errors below 6% under optimized conditions. At the optimal parameter combination, a channel width of 216.93&#xa0;μm and depth of 360.98&#xa0;μm were achieved, confirming the reliability of the proposed optimization approach. The presented framework provides a quantitative guideline for controlled and repeatable microchannel fabrication suitable for MEMS and microfluidic device applications.</p> Graphical Abstract <p></p>

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Parametric optimization of laser micromachining for enhanced microchannel geometry and surface topography in MEMS: an experimental investigation

  • 期刊论文

  • 发表日期：

    2026年3月25日

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  • Santosh Kumar Rai,
  • Mahesh Kumar Gupta,
  • Kuwar Pratap Singh,
  • Arun Uniyal,
  • Ashwani Kumar,
  • Yogesh Kumar Singla

摘要

Microchannels (MICHs) play a critical role in microfluidic, thermal management, and MEMS-based applications, where dimensional precision and surface integrity are essential. Although laser micromachining offers a rapid and flexible fabrication approach, systematic multi-parameter optimization for plexiglas-based microchannels remains limited. In this study, a statistically validated optimization framework was developed for CO₂ laser micromachining of plexiglas substrates. Five key process parameters—laser power, traverse velocity, pulse frequency, spot size, and number of passes—were investigated using Response Surface Methodology (RSM) combined with Central Composite Design (CCD). Scanning Electron Microscopy (SEM) was employed to evaluate channel geometry, surface morphology, and heat-affected zone characteristics. The results indicate that increased laser power significantly enhances channel depth, while higher traverse velocity reduces thermal penetration. Interaction analysis revealed dominant influence of power and traversing on both depth and width responses. The developed regression models demonstrated strong statistical adequacy (R² > 0.97) with prediction errors below 6% under optimized conditions. At the optimal parameter combination, a channel width of 216.93 μm and depth of 360.98 μm were achieved, confirming the reliability of the proposed optimization approach. The presented framework provides a quantitative guideline for controlled and repeatable microchannel fabrication suitable for MEMS and microfluidic device applications.

Graphical Abstract