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<p>Water jet-guided laser (WJGL) technology enables high-precision laser energy delivery and thermal effect suppression through a water jet medium, demonstrating significant advantages in applications such as aeroengine film cooling hole drilling, semiconductor wafer dicing, and hard-brittle material processing. However, geometric deviations in the jet caused by nozzle replacement and the lack of real-time on-machine monitoring techniques for machining states severely limit its machining accuracy and closed-loop control capabilities. Conventional offline inspection methods, which rely on optical microscopy and scanning electron microscopy, suffer from inefficiency and latency. Existing on-machine measurement technologies are constrained by material properties (reflectivity, transparency and so forth) and environmental interference (mist, bubbles, splashing), hindering universal high-precision measurement. This study proposes an on-machine measurement method based on water jet resistance triggering that innovatively leverages the dual functionality of the water jet as both a processing medium and a detection signal carrier. This approach overcomes the reliance of conventional techniques on material surface properties. By precisely triggering measurements through abrupt changes in the contact resistance of the jet-workpiece, on-machine “processing-detection” operations can be achieved, combining the reliability of contact-based detection with the nondestructive nature of noncontact methods. Experimental studies systematically quantified interference factors during the jet approach and validated the accuracy of the micron-level measurements through calibration tests using gauge blocks, pin gauges, and reference spheres, with the measurement repeatability outperforming that of tactile trigger probes. The method achieved a mean measurement error comparable to that of commercial probes but demonstrated superior repeatability, with a standard deviation of 0.3–0.5&#xa0;μm, compared to 0.8&#xa0;μm for conventional tactile trigger probes (e.g., Renishaw LP2) under identical conditions. Angle calibration experiments for the water jet were conducted via standardized artifact measurements, and the advantages and limitations of different detection strategies were compared. This work establishes a technical foundation for closed-loop control in WJGL machining, addresses critical bottlenecks such as high jet alignment optimization costs and low offline inspection efficiency, and provides a robust solution for complex materials and microstructured components.</p>

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Trigger detection method based on jet multiplexing for water jet-guided laser systems

  • 期刊论文

  • 发表日期：

    2026年3月19日

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  • Wenhan Tang,
  • Fuzhu Han,
  • Xinghan Xu,
  • Qingquan Zhao

摘要

Water jet-guided laser (WJGL) technology enables high-precision laser energy delivery and thermal effect suppression through a water jet medium, demonstrating significant advantages in applications such as aeroengine film cooling hole drilling, semiconductor wafer dicing, and hard-brittle material processing. However, geometric deviations in the jet caused by nozzle replacement and the lack of real-time on-machine monitoring techniques for machining states severely limit its machining accuracy and closed-loop control capabilities. Conventional offline inspection methods, which rely on optical microscopy and scanning electron microscopy, suffer from inefficiency and latency. Existing on-machine measurement technologies are constrained by material properties (reflectivity, transparency and so forth) and environmental interference (mist, bubbles, splashing), hindering universal high-precision measurement. This study proposes an on-machine measurement method based on water jet resistance triggering that innovatively leverages the dual functionality of the water jet as both a processing medium and a detection signal carrier. This approach overcomes the reliance of conventional techniques on material surface properties. By precisely triggering measurements through abrupt changes in the contact resistance of the jet-workpiece, on-machine “processing-detection” operations can be achieved, combining the reliability of contact-based detection with the nondestructive nature of noncontact methods. Experimental studies systematically quantified interference factors during the jet approach and validated the accuracy of the micron-level measurements through calibration tests using gauge blocks, pin gauges, and reference spheres, with the measurement repeatability outperforming that of tactile trigger probes. The method achieved a mean measurement error comparable to that of commercial probes but demonstrated superior repeatability, with a standard deviation of 0.3–0.5 μm, compared to 0.8 μm for conventional tactile trigger probes (e.g., Renishaw LP2) under identical conditions. Angle calibration experiments for the water jet were conducted via standardized artifact measurements, and the advantages and limitations of different detection strategies were compared. This work establishes a technical foundation for closed-loop control in WJGL machining, addresses critical bottlenecks such as high jet alignment optimization costs and low offline inspection efficiency, and provides a robust solution for complex materials and microstructured components.