Micro/nano scale micro-motion platforms for extreme manufacturing: design, development and application
摘要
Micro/nano scale micro-motion platforms (MMP) serve as the enabling technology for extreme manufacturing. The design principles for the key elements of MMP are currently fragmented across isolated disciplines. However, this lack of a unified theoretical framework makes it difficult for engineers to transfer successful design strategies from one field to another, impeding the development of versatile high-performance systems. Therefore, this review focuses on extreme fields that demand ultra-high precision, involve micro-scale dimensions, and operate under highly complicated conditions, providing the unique design trade-offs and coupling mechanisms required to balance precision with environmental adaptability with a focus on application-driven design principles and performance features. First, the classifications of the key components of MMP are presented, along with their design principles, advantages, and limitations. Additionally, this review conducts a comprehensive analysis of the intrinsic relationships, operational mechanisms, representative solutions, and unique advantages of MMP within extreme manufacturing, including micro-nano positioning platform, micro vibration assisted system, micro robotic system, and biomedical device configuration. Finally, the emerging trends and future development directions of MMP technology are envisioned. This review aims to provide a cross-disciplinary synthesis technological reference for researchers and engineers engaged in precision motion in the field of extreme manufacturing.