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<p>This paper presents the development and experimental validation of LS-HPPNS, a clean energy-driven solution that integrates a pneumatic servo system for long-stroke positioning and a piezoelectric servo system for nanometer-level precision. The proposed control strategy, combining a Fractional-Order Proportional Sliding Mode Controller (FOPSMC) and a Fractional-Order Active Disturbance Rejection Observer (FOAESO), enhances positioning accuracy, energy efficiency, and operational stability. Experimental results demonstrate that FOPSMC+FOAESO achieves nanometer-level positioning accuracy, maintaining precision within <InlineEquation ID="IEq1"> <EquationSource Format="TEX">\(\pm \text {10 nm}\)</EquationSource> </InlineEquation> while reducing energy consumption by 19% and improving positioning accuracy by 18% compared to its integer-order counterpart, PSMC+ESO. Robustness evaluations further confirm that the proposed method maintains stable tracking under varying loads and air pressures. In a dual-stage safety verification experiment, FOPSMC+FOAESO maintained smooth and stable motion during a sudden 70&#xa0;mm position change (250&#xa0;mm&#xa0;<InlineEquation ID="IEq2"> <EquationSource Format="TEX">\(\rightarrow\)</EquationSource> </InlineEquation>&#xa0;180&#xa0;mm), yielding smoother yet slower responses. In the nano-positioning stage, it achieved overshoot-free motion and a 1% steady-state error—matching the settling time of SMC+ESO while eliminating transient oscillations. These quantitative findings verify that FOPSMC+FOAESO provides a safe, energy-efficient, and highly precise control framework for advanced long-stroke nanopositioning.</p>

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Fractional-order control of a hybrid pneumatic-piezoelectric nanopositioning system for high-precision and energy-efficient motion

  • 期刊论文

  • 发表日期：

    2025年12月8日

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  • Lian-Wang Lee,
  • Pin-Ju Chen,
  • I-Hsum Li

摘要

This paper presents the development and experimental validation of LS-HPPNS, a clean energy-driven solution that integrates a pneumatic servo system for long-stroke positioning and a piezoelectric servo system for nanometer-level precision. The proposed control strategy, combining a Fractional-Order Proportional Sliding Mode Controller (FOPSMC) and a Fractional-Order Active Disturbance Rejection Observer (FOAESO), enhances positioning accuracy, energy efficiency, and operational stability. Experimental results demonstrate that FOPSMC+FOAESO achieves nanometer-level positioning accuracy, maintaining precision within \(\pm \text {10 nm}\) while reducing energy consumption by 19% and improving positioning accuracy by 18% compared to its integer-order counterpart, PSMC+ESO. Robustness evaluations further confirm that the proposed method maintains stable tracking under varying loads and air pressures. In a dual-stage safety verification experiment, FOPSMC+FOAESO maintained smooth and stable motion during a sudden 70 mm position change (250 mm  \(\rightarrow\)  180 mm), yielding smoother yet slower responses. In the nano-positioning stage, it achieved overshoot-free motion and a 1% steady-state error—matching the settling time of SMC+ESO while eliminating transient oscillations. These quantitative findings verify that FOPSMC+FOAESO provides a safe, energy-efficient, and highly precise control framework for advanced long-stroke nanopositioning.