Dynamic analysis and PID control of milling forces and vibrations for enhanced machining stability
摘要
This research presents a study of the dynamics of milling forces and vibrations, which are crucial for achieving high precision in semiconductor manufacturing. A systematic investigation of the influence of critical machining parameters, such as milling speed, feed rate, and depth of cut, is conducted on the stability regions. Through this research, the aim is to identify the optimal machining conditions that maximize the quality and precision. Using force–time diagrams, the stable and unstable regions can be characterized. This allows for precise adjustments in the cutting parameters to minimize the chatter and enhance the process stability. Also, the force vs vibration contour plots are studied in this research to visualize the intricate relationship between the machining forces and the vibrations. This provides deeper insights into the operational limits. The PID control acts as a control mechanism to reduce the force and vibrations obtained and provide the optimum cutting parameters for the reduced data. The results show that the specific combinations of the milling speed, feed rate, and the depth of cut yield in significant improvements to machining stability. Results from the PID controller achieve a significant reduction in the vibration amplitude by 10% and force amplitude by 30%. The force time diagram shows a mid-range force value to be the most stable. This ensures chatter-free machining. Also, from the contour plots, we observed a low force and high vibration, and vice versa phenomenon.