<p>Cube corner microstructure is a typical shape of retroreflective micro-structured surface, which has been widely applied in different advanced fields. With the cube corner size down to micrometers, the machining difficulty and cost increase significantly. Diamond micro chiseling (DMC) process has been proposed and proved to be an effective method for machining the cube corner microstructure. However, some challenges still exist during the DMC process, such as time-consuming, tool wear and machining defects. In this paper, a further study of the modified DMC method is reported to eliminate the machining defects and increase the processing quality. Although the previous DMC method could eliminate the cutting traces and burrs of microstructure and reduce the processing time considerably, the slight overcut was still found at the corner between two adjacent facets of the cube under a more precise observation. Therefore, to solve the overcut of the machined microstructure and improve the machining quality, the reason for the overcut is analyzed in-depth, and subsequently, the solution is proposed. The experiment results indicate that the optimization of tool path is more effective than the cutting velocity optimization. By using the optimized tool path, the machining parameters are further adjusted, and a better surface roughness result is acquired on the machined cube facets.</p>