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<p>Microstructures in glass materials have important applications in fields such as aerospace, MEMS, and medicine. Current non-traditional machining methods used for micro-slit fabrication suffer from poor sustainability, large slit widths, and poor surface quality. To analyze the transformation relationship between the electrical energy and the heat energy from the discharge plasma point of view, a new method of electrochemical-assisted discharge plasma machining of glass microstructures by ultrasonic vibrating wire electrode is proposed. Firstly, the electrothermal energy conversion is studied through simulation and modeling, and the mechanism of improving machining quality by ultrasonic is illustrated. Then, the influence of the key machining parameters on the quality of the slit is studied. The experimental results show that when ultrasonic vibration is applied to the wire electrode, the optimum amplitude is 7.5&#xa0;μm. The average slit width is reduced by 20.99% and the surface roughness is reduced by 54.23%. Finally, the micro-star structure with a slit width of 64.94&#xa0;μm and surface roughness of 0.35&#xa0;μm was successfully machined by selecting the optimum parameters. It is shown that the electrochemical-assisted discharge plasma machining of glass microstructures by ultrasonic vibrating wire electrode can effectively improve the machining quality and stability, providing the feasibility for further machining of more complex microstructures of non-conductive hard brittle materials.</p>

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Mechanism and experimental study on electrochemical-assisted discharge plasma machining of glass microstructures by ultrasonic vibrating wire electrode

  • 期刊论文

  • 发表日期：

    2025年2月10日

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  • Haichao Xu,
  • Yong Liu,
  • Chengzhi Wang,
  • Kan Wang

摘要

Microstructures in glass materials have important applications in fields such as aerospace, MEMS, and medicine. Current non-traditional machining methods used for micro-slit fabrication suffer from poor sustainability, large slit widths, and poor surface quality. To analyze the transformation relationship between the electrical energy and the heat energy from the discharge plasma point of view, a new method of electrochemical-assisted discharge plasma machining of glass microstructures by ultrasonic vibrating wire electrode is proposed. Firstly, the electrothermal energy conversion is studied through simulation and modeling, and the mechanism of improving machining quality by ultrasonic is illustrated. Then, the influence of the key machining parameters on the quality of the slit is studied. The experimental results show that when ultrasonic vibration is applied to the wire electrode, the optimum amplitude is 7.5 μm. The average slit width is reduced by 20.99% and the surface roughness is reduced by 54.23%. Finally, the micro-star structure with a slit width of 64.94 μm and surface roughness of 0.35 μm was successfully machined by selecting the optimum parameters. It is shown that the electrochemical-assisted discharge plasma machining of glass microstructures by ultrasonic vibrating wire electrode can effectively improve the machining quality and stability, providing the feasibility for further machining of more complex microstructures of non-conductive hard brittle materials.