<p>This paper presents an effective topology optimization framework for the design of compliant mechanisms, integrating the immersed finite element method with adaptive mesh refinement and radial basis function (RBFs)-interpolated level set method. The proposed approach addresses the challenges of representing complex material boundaries and enhancing resolution in critical interface regions, which are common in the optimization of compliant mechanisms. By leveraging the global support properties of RBFs, the method efficiently captures global changes in response to local adjustments in the level set function, resulting in a fast convergence to optimal designs. Parameterizing the level set function with global interpolation radial basis functions enables smooth variations of the function across the entire design domain during iterations. This capability holds significant importance, particularly in the context of topology optimization of compliant mechanisms, where intricate geometries with complex shapes and features may arise. The effectiveness of the proposed method is demonstrated through numerical examples, showcasing its ability to produce the optimum design starting from various initial configurations.</p>