Stability Analysis and Optimal Design of a Multi-stage Amplifier for Piezoelectric Ceramics Actuators Based on Equivalent Circuit Model
摘要
Piezoelectric ceramic actuators are widely used in precision positioning, but their inherent capacitive nature often degrades driving amplifier stability, leading to self-excitation. To systematically address this issue, a unified multi-stage equivalent-circuit model is developed for stability analysis and compensation design of cascaded piezoelectric power amplifiers. Open-loop modeling of the deep negative-feedback structure reveals that the interaction between internal poles and the capacitive load forms a multi-pole system with insufficient phase margin and an unstable 60 dB/decade loop closure rate at crossover. Based on the analytical results, a comprehensive compensation strategy is proposed, integrating an output isolation resistor, a Miller RC network, and a feedback lead capacitor. Simulation results verify that the compensated amplifier achieves a stable 20 dB/decade loop closure, a robust phase margin of