<p>Piezoelectric ceramic actuators are widely used in precision positioning, but their inherent capacitive nature often degrades driving amplifier stability, leading to self-excitation. To systematically address this issue, a unified multi-stage equivalent-circuit model is developed for stability analysis and compensation design of cascaded piezoelectric power amplifiers. Open-loop modeling of the deep negative-feedback structure reveals that the interaction between internal poles and the capacitive load forms a multi-pole system with insufficient phase margin and an unstable 60 dB/decade loop closure rate at crossover. Based on the analytical results, a comprehensive compensation strategy is proposed, integrating an output isolation resistor, a Miller RC network, and a feedback lead capacitor. Simulation results verify that the compensated amplifier achieves a stable 20 dB/decade loop closure, a robust phase margin of <InlineEquation ID="IEq1"> <EquationSource Format="TEX">\(50^{\circ }\)</EquationSource> </InlineEquation>-<InlineEquation ID="IEq2"> <EquationSource Format="TEX">\(75^{\circ }\)</EquationSource> </InlineEquation> across load capacitances from 0.1 to 5 μF, and a small-signal bandwidth of approximately 106 kHz under no-load conditions. Experimental measurements further confirm excellent transient performance, demonstrating a 0-120 V output range, and a 6.9 <InlineEquation ID="IEq4"> <EquationSource Format="TEX">\(\mu \)</EquationSource> </InlineEquation>s rise time without overshoot. This model-driven framework provides clear physical insight and quantitative design guidance, eliminating reliance on empirical tuning for robust PZT driver stability.</p>

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Stability Analysis and Optimal Design of a Multi-stage Amplifier for Piezoelectric Ceramics Actuators Based on Equivalent Circuit Model

  • Hai Li,
  • Haoyu Fang,
  • Aoyang Li,
  • Jianhao Lai,
  • Zhenhui Zhan,
  • Xianmin Zhang

摘要

Piezoelectric ceramic actuators are widely used in precision positioning, but their inherent capacitive nature often degrades driving amplifier stability, leading to self-excitation. To systematically address this issue, a unified multi-stage equivalent-circuit model is developed for stability analysis and compensation design of cascaded piezoelectric power amplifiers. Open-loop modeling of the deep negative-feedback structure reveals that the interaction between internal poles and the capacitive load forms a multi-pole system with insufficient phase margin and an unstable 60 dB/decade loop closure rate at crossover. Based on the analytical results, a comprehensive compensation strategy is proposed, integrating an output isolation resistor, a Miller RC network, and a feedback lead capacitor. Simulation results verify that the compensated amplifier achieves a stable 20 dB/decade loop closure, a robust phase margin of \(50^{\circ }\) - \(75^{\circ }\) across load capacitances from 0.1 to 5 μF, and a small-signal bandwidth of approximately 106 kHz under no-load conditions. Experimental measurements further confirm excellent transient performance, demonstrating a 0-120 V output range, and a 6.9 \(\mu \) s rise time without overshoot. This model-driven framework provides clear physical insight and quantitative design guidance, eliminating reliance on empirical tuning for robust PZT driver stability.